By ALLRESIST GmbH
Supplier Info
Product Type:
Parts & Consumables
Application:
Chemicals & Photoresists
Product Description:
The Allresist AR 300-80 new is a high-resolution positive photoresist designed for advanced semiconductor, MEMS, and micro-/nanofabrication applications. Engineered for precision, high contrast, and reproducible performance, it enables the formation of submicron features with sharp line edges and uniform coating.
Characterisation:
- improvement of the adhesive strength of photo and e-beam resist films
- especially for surfaces with low adhesion properties, e.g. metal, SiO2, GaAs
- AR 300-80 new: spin coating of a silicium organic solution = improved adhesion properties and simple, cheaper – alternative to HDMS
AR 300-80 new Properties:
- Density at 20 °C: 0.971 g/cm3
- Flash Point: 46 °C
- Filtration: 0.2 µm
- Storage 6 month: 15-22 °C
- Available to order in pack sizes: 1L
Pricing available on request.
There are currently no videos available.
Processing information
AR 300-80 new is applied by spin coating between 1000 and 6000 rpm. The film thickness can be adjusted by varying the spin speed to the optimum conditions of the respective process.
Higher spin speeds and thus thinner films are preferable, e.g. 4000 rpm with approx. 15 nm thickness. Too high concentrations (film thickness values) may reduce or neutralise the adhesion-promoting effect.
It is recommended for AR 300-80 new to perform the subsequent tempering on a hot plate for 2 min or in a convection oven for 25 min at 180 °C. AR 300-80 new offers the big advantage for sensitive substrates that a bake step at olny 60 °C for the same amount of time is sufficient, even though higher temperatures are well tolerated.
During tempering, a very uniform, extremely thin layer of adhesion promoter is generated on the substrate (approx. 15 nm). After cooling of the substrate, the resist can be applied as usual.
An excess of adhesion promoter may be rinsed off with organic solvents like e.g. AR 600-71. The optimised surface properties are maintained without restriction.